A resistor is made by diffusion doping with longitudinal gauge factor of 50. The length, width
and height of the cantilever are 100μm, 20μm and 10 μm respectively. If a force F=75 μN is applied
to the end of the cantilever in the longitudinal direction, what will be the change in magnitude of
resistance (in ohm) if the initial resistance is 1 kΩ? Assume Young’s modulus of Si to be 150 GPa.
Please send your answer with explanation guys.
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The longitudinal axis of the cantilever points in the [ 100] crystal orientation. The resistor is made by diffusion doping, with a longitudinal gauge factor G=50
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