Question

Analyse both the pull-in effect of parallel plate capacitor and the change in the distance between the plates. Prove that the parallel plate capacitor can act as a switch under favourable operating conditions. in mems and nems
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Answer 1

Answer:

The pull-in voltage is one of the most important parameters of MEMS design. It was shown in Equation [1.4] that the pull-in voltage is inversely proportional to the actuation area. Thus, the actuation electrodes must be large enough, so that the actuation voltage is not unreasonably increased. As a result, footprints of many RF MEMS components are mainly determined by the actuation area and not by the ‘useful’