Question

Analyse both the pull-in effect of parallel plate capacitor and the change in the distance between the plates. Prove that the parallel plate capacitor can act as a switch under favourable operating conditions. in mems and nems
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Answer 1

Answer:

The movable plate is charged to a voltage V quickly at its original position, and soon the voltage supply is disconnected before the plate can move an appreciable distance (Fig.a). Find (1) the expression of the force on the movable plate for a displacement y (Fig.b); (2) the force for y=2μm. (The nominal gap distance is d=5μm, the area of plate A=4mm2 and V=10V).

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