crystal growth of wafer, oxidation
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Therefore, crystals are typically grown a few millimeters oversize on diameter and ground down to the required … Fisher et al.: Silicon Crystal Growth and Wafer Technologies … F. Polishing With ever smaller device geometries, the wafer surface needs to be highly planar on even …
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grade silicon EGS. The reaction takes place in a reactor containing resistance heated silicon rod, which serves as the nucleation point for deposition of EGS in polycrystalline form of high purity. This is the raw material used to prepare device quality single crystal.
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