Question

Difference between dry oxidation and wet oxidation

Answer 1

wet oxidation is d oxidation of a substance in d prescence of moisture.

dry oxidation is d oxidation of a substance in d abscence of moisture.

Answer 2

In semiconductor production, the word “oxidation” is used to indicate the change of silicon to silicon dioxide. This can be achieved by various methods 1. thermal oxidation or 2. electrochemical oxidation.  The term “oxidation” is applied only for changing the actual layer of silicon to silicon dioxide. The method can be classified into thermal oxidation or electrochemical oxidation. Thermal oxidation that is heating can be farther subdivided into dry and wet oxidation. Dry oxidation determines it is oxidized with oxygen. Wet oxidation determines the silicon is oxidized with a stream or water vapor.