Effect of high k dielectric on current
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Where κ and t are the dielectric constant and physical thickness of high-κ dielectrics. In this section, effect of tunneling current for various high-k dielectric materials have been studied. This also signify the effect of effective mass on performance of various high-k dielectric materials.
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The termhigh-κ dielectricrefers to a material with a highdielectric constantκ (as compared tosilicon dioxide). High-κ dielectrics are used insemiconductor manufacturingprocesses where they are usually used to replace a silicon dioxidegate dielectricor another dielectric layer of a device. The implementation of high-κ gate dielectrics is one of several strategies developed to allow further miniaturization of microelectroniccomponents, colloquially referred to as extendingMoore's Law.
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