for Sf6 molecule, give the following:
(i) Hybridisation of
s atom
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Sulfur Hexafluoride (SF6) is a colorless, odorless, non-toxic liquefied gas. Shipped as a liquid under its own vapor pressure.
Applications
Sulfur Hexafluoride (SF6) is used for plasma etching prior to chemical vapor deposition (CVD). These processes include oxide etching, nitride etching and wafer cleaning. Sulfur Hexafluoride gas, which is itself inert, disassociates in the presence of an RF field to form reactive fluorine ions. These highly reactive ions are excellent for etching tungsten and tungsten silicide films.
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