How to improve adhesion in metal glass thin films?
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I am currently trying to build a microelectrode with 5 um size features. I first attempted to do a wet etching method in which I deposited chromium and then gold on piranah-cleaned borosilicate glass slides. I then laid down a positive photoresist which was UV exposed and developed to obtain my pattern. All features were maintained after development and gold etching. However, at the chromium etching step, features began to fall off the glass slide after 1 min. I have tried oxygen and SF6 plasma treatments on the glass prior to depositing the metal and haven't found a significant difference. Concerned that the borosilicate glass might have an effect, I also tried performing the procedure on a silcon wafer and still had poor adhesion. Any advice to help improve adhesion between the chromium and glass would be much appreciated.