In fabry protection Interferometer we analysis the transmitted light
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Electrically Tunable Micromachined Fabry-Perot Interferometer
The Fabry-Perot interferometer is an optical resonator consisting of two parallel mirrors. Fabry-Perot interferometers can be made by silicon bulk micromachining.45,46 Silicon surface micromachining is also a suitable technique for making interferometers for infrared wavelengths.
The principle of a gas concentration measurement system operating on an electrically tunable micromachined Fabry-Perot interferometer is NDIR (non-dispersive infrared) single-beam dual-wavelength measurement.46 The interferometer is tuned so that the pass band coincides with the absorption band of the measured gas. A detector records the signal strength after the measurement chamber. The pass band of the Fabry-Perot interferometer then shifts to either side of the absorption band, and the signal now detected constitutes the reference signal