Question

parallel plate capacitor with an area (A) of 100 µm × 100 µm is supported by four cantilever beams (fixed guided). The plate is made of the polycrystalline silicon that is t = 2 µm thick. The distance between the bottom of the plate and the substrate is d = 1 µm. Each cantilever beam is 400 µm long (l), 20 µm wide (w), and 0.10 µm thick (h).

Density of the polycrystalline silicon is 2330 kg/m3 and Young’s modulus of the polysilicon is 150 GPa. [g = 10 m/s2]
Find out the static displacement (in m) under an acceleration of 0.1 g. Assume g = 10 m/s2.​

Answer 1

Answer:

sorry dont know the answer