sputtering is a process of conversion of
01)
Both of these
O2)
coated element in to gaseous ions
O3)
None of these
04)
Coated element in to gaseous atoms
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Answer:
answer is option 4
Explanation:
On an atomic level, sputtering is the process whereby atoms are ejected from a target or source material that is to be deposited on a substrate - such as a silicon wafer, solar panel or optical device - as a result of the bombardment of the target by high energy particles.
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