Transparent conducting oxide advantages and disadvantages
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ITO is typically possesses better conductivity than AZO (aluminium doped zinc oxide), which means that ITO film is more conductive than AZO for a given thickness. Additionally, ITO is more robust than AZO, because AZO is likely to degrade rapidly under humidity air. However, due to the high cost of indium, ITO is typically more expensive.
For gallium nitride LEDs, you need to consider lattice match between GaN and TCO. I am not certain, but I guess ZnO may provide a better lattice match.
I hope this is helpful.
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