Question

what is the difference between MEMS sensor and MEMS actuator​

Answer 1

Answer:

MEMS Sensors and Actuators. Accelerometers and gyros are sensors because the convert the non-electrical input "acceleration" or "angular velocity" into electrical signals - and that's what sensors do. The DLP Chip is an actuator because it converts electrical signals to mechanical displacements of mirrors.

Answer 2

Answer:

MEMS Sensors and Actuators. Accelerometers and gyros are sensors because the convert the non-electrical input "acceleration" or "angular velocity" into electrical signals - and that's what sensors do. The DLP Chip is an actuator because it converts electrical signals to mechanical displacements of mirrors.