You are using koh etching to define a 200 mm thru-hole in a 100 wafer. What should the dimensions on your mask be if you are using a: a) 400 mm thick wafer b) 600 mm wafer. What would be the dimensions of the thru-hole be if you used the mask intended for the 400 mm thick wafer on the 600 mm thick wafer?
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Answer:
358mm
Explanation:
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