Difference between random and systematic variation on die
Answers
Answered by
1
s integrated circuit technology continues
its historic progression down the road to ever
diminishing feature size, device yield inhibitors due
to systematic and random defects play an increasingly
critical role in controlling the rates of technology
learning and yield ramping. This paper presents a
variety of new methods for facilitating random and
systematic defect learning during the development of
0.18-0.25 micron Logic technology, emphasizing four
principal activities - predicting random defect limited
yield, improving process tool particle control,
addressing systematic limited yield, and optimizing
in-line defect inspections applied to both product and
short flow monitors.
Similar questions