Question

Experiment for dependence of angle of deviation on angle of incidence using hollow prism

Answer 1

Explanation:

Immersion fluids for 157 nm and 193 nm immersion lithography have been measured over the spectral range

from 156 nm to 1700 nm in a nitrogen purged environment. The refractive index n and k of several candidate fluids

have been measured using the prism minimum deviation technique implemented on a commercial Variable Angle

Spectroscopic Ellipsometer (VASE

) system. For measurement the liquids were contained in a triangular prism cell

made with fused silica windows. The refractive index of high-purity water at 21.5 C measured ov ....etc