Why scaling laws are important while learning micro-systems?
Answers
Answered by
0
mmary
Overview of the dominant physical effects and scaling of laws that applies when downsizing sensors and actuators in microsystems. Show the limits and breakdown of scaling laws in miniaturization. Several examples taken from research articles are presented for each case.
Content
Introduction to scaling laws
Scaling of classical mechanical systems, scaling of classical electrical systems, breakdown in scaling, quantum breakdown
Thermal effects
Conduction, convection, dynamics, breakdown, thermal micro-actuators, microreactors
Mechanical devices
Mass-spring model, mechanical noise, squeeze film effects
Electrical devices
Electrostatic micro-actuators, electrostatic breakdown, tunnel sensors, coils and inductors, electromagnetic micro-actuators, magnetostriction, magnetic beads
Microfluidics
Liquid flow, gas flow, mixing, surface tension, entropy trapping, chromatography
Electrokinetics
Dielectrophresis, EHD and MHD pumps, electrowetting, electroosmosis.
Learning Prerequisites
Recommended courses
Sensors (MICRO-330) very strongly recommended, and content will be assumed to be mastered.
Important concepts to start the course
Students must have a solid mastery of physics (mechanics, heat transfer, eletromagnetism, fluid dynamics), chemistry, and be familiar with MEMS fundamentals (concepts, basic microfabrication) and miniaturized sensors.
Learning Outcomes
By the end of the course, the student must be able to:
Analyze MEMS devices to determine optimum actuation principle for a given size-scale
Estimate microsystems performance based on scaling arguments
Justify choice of sensing or actuation principle
Exploit scaling to design a MEMS device
Transversal skills
Overview of the dominant physical effects and scaling of laws that applies when downsizing sensors and actuators in microsystems. Show the limits and breakdown of scaling laws in miniaturization. Several examples taken from research articles are presented for each case.
Content
Introduction to scaling laws
Scaling of classical mechanical systems, scaling of classical electrical systems, breakdown in scaling, quantum breakdown
Thermal effects
Conduction, convection, dynamics, breakdown, thermal micro-actuators, microreactors
Mechanical devices
Mass-spring model, mechanical noise, squeeze film effects
Electrical devices
Electrostatic micro-actuators, electrostatic breakdown, tunnel sensors, coils and inductors, electromagnetic micro-actuators, magnetostriction, magnetic beads
Microfluidics
Liquid flow, gas flow, mixing, surface tension, entropy trapping, chromatography
Electrokinetics
Dielectrophresis, EHD and MHD pumps, electrowetting, electroosmosis.
Learning Prerequisites
Recommended courses
Sensors (MICRO-330) very strongly recommended, and content will be assumed to be mastered.
Important concepts to start the course
Students must have a solid mastery of physics (mechanics, heat transfer, eletromagnetism, fluid dynamics), chemistry, and be familiar with MEMS fundamentals (concepts, basic microfabrication) and miniaturized sensors.
Learning Outcomes
By the end of the course, the student must be able to:
Analyze MEMS devices to determine optimum actuation principle for a given size-scale
Estimate microsystems performance based on scaling arguments
Justify choice of sensing or actuation principle
Exploit scaling to design a MEMS device
Transversal skills
Similar questions