Question

Advance oxidation processes nptel written notes

Answer 1

In semiconductor manufacturing the term “oxidation” is used to refer the conversion of silicon to silicon dioxide. This can be done by different methods 1. thermal oxidation or 2. electrochemical oxidation. In IC technology, mainly thermal oxidation is used. We will learn the details of thermal oxidation and briefly about electrochemical oxidation. We will also learn about the theoretical modeling of thermal oxidation. It is important to note that the deposition of silicon dioxide (e.g. by CVD) is not called oxidation. Thus the term “oxidation” is used only for converting existing layer of silicon to silicon dioxide. Thus, it is a modification process. We take silicon and modify it to get silicon dioxide. In that sense, it is similar to doping where N- type or P-type material is added to silic